Vertical cavity surface emitting lasers with SiO2/Si3N4 dielectric Distributed Bragg reflector

This paper describes a VCSEL with dielectric Distributed Bragg Reflector fabricated by ICPCVD at 75°C instead of the top DBR. The maximum optical power of the VCSEL is 1mW at room temperature, the side mode rejection ratio is up to 30dB, and the far-field divergence angle is 35 deg.