열 분포를 고려한 Heating Plate 열선 간격 최적 설계

In this study, optimum design of heating line distance in photo resist bake oven was conducted for thermal distribution. Base line FV model and simplified model were developed for validation of base machine’s thermal distribution. Results of two models were compared for verifying feasibility of simplified model. Analysis area was divided by 3 parts through a result of graph which is derived from base line model analysis. Range of design variables was derived from measured value. Model modification was conducted for optimum design based on DOE. Objective function is minimizing of heat distribution on heating plate and optimization was conducted using RSM. Optimal design was confirmed that heat deviation was less than base heating line model.