Tunable Aperture with Single layer Blades Actuated by Thermal Expansion of Silicon Beams

A tunable aperture with single layer blades actuated by thermal expansion of silicon beams is developed. The tunable aperture that consists of blade including misaligned silicon chevron beam can achieve high displacement of the blade. To design the desired tunable aperture, COMSOL MULTIPHYSICS simulator and MEMS fabrication process are used. The dimension of the tunable aperture is 10.2mm X 10.2mm X 0.365mm. In the results, diameter of the fabricated tunable aperture is achieved 1.6mm under no applied voltage and 1.25mm under applied voltage of 3V. Also it has analog state compared to other type of tunable aperture. Using the tunable aperture could obtain 3D image and distance information in a single camera system simultaneously.