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Highly uniform and structures grown in a multiwafer vertical rotating susceptor MOVPE reactor
Highly uniform and structures grown in a multiwafer vertical rotating susceptor MOVPE reactor
1997
X. Zhang
Ingrid Moerman
Carl Sys
Piet Demeester
Ja Crawley
E. J. Thrush
Keywords:
Susceptor
Chemistry
Inorganic chemistry
Metalorganic vapour phase epitaxy
Chemical engineering
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