Increase in the Sensitivity and Selectivity of Semiconductor Gas Sensors

Within the limits of a linear model based on processing of data of direct calibration measurements with semiconductor multisensors, a method of their calibration by standard levels of gas concentration is substantiated for its subsequent application for small concentration levels. On an example of data for nitrogen dioxide, the notion of the normalized surface density of the gas is introduced, and its relationship with the volume concentration is established. On this basis, the feasibility of increase in the sensitivity and selectivity of the multisensor system by several orders of magnitude compared with the existing instrumental methods is substantiated by imitational modeling using mathematical methods of modern algebra and regularization theory.