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Large Area Deposition of Device Quality SiO2 for Poly Si TFT Fabrication
Large Area Deposition of Device Quality SiO2 for Poly Si TFT Fabrication
1993
Plais
Morin
Stroh
Kretz
Legagneux
Huet
Walaine
Pribat
Jiang
Hugon
Agius
Keywords:
Fabrication
Thin-film transistor
Deposition (chemistry)
Materials science
Amorphous silicon
Logic gate
quality
Optoelectronics
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