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Role of the Adhesion Force during Copper Chemical Mechanical Planarization
Role of the Adhesion Force during Copper Chemical Mechanical Planarization
2018
Jing Li
Jun Liu
Jie Cheng
Hongkai Li
Tongqing Wang
Jianlin Liu
Keywords:
Inorganic chemistry
Copper
Adhesion
Chemistry
Chemical-mechanical planarization
adhesion force
Chemical engineering
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