Old Web
English
Sign In
Acemap
>
Paper
>
Semiconductor Nano and Micro Membrane Based Pressure Sensors for Wide Bandwidth Measurements
Semiconductor Nano and Micro Membrane Based Pressure Sensors for Wide Bandwidth Measurements
2019
Yuhong Kang
Ridge A. Sibold
M. Homer
L. Gladwin
Richard O. Claus
Wing Ng
Hang Ruan
Keywords:
Membrane
Materials science
Pressure sensor
Optoelectronics
Semiconductor
Bandwidth (signal processing)
Nano-
Wind tunnel
Frequency response
Reynolds number
Silicon
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]