A Study on Dynamic Modeling of the Vibration Isolation System for the Ultra Precision Measurement

The anti-vibration tables that use air suspensions as dampers have been widely used due to their high anti-vibration performance in wide frequency band. However, they face a problem of easily accelerating the vibration when triggered by external force because their air suspensions have low rigidity and dampness. In response, there has been a study on active/semi-active dampers that use only the passive components like air suspensions to complement the passive-control format. Thus, we have dynamically analyzed the active/semi-active control of such passive anti-vibration tables. To demonstrate the anti-vibration table`s control system, we have also constructed a kinetic model based on the physical characteristics of an anti-vibration table with 6 degrees of freedom and verified its applicability through analysis and experiments.