The fabrication of linear variable filters

With a self designed mask for adjusting the thin film thickness,using PVD technique,linear variable filters are fabricated on the base slats of 1cm×3cm.The base slats are made of K9 glass and Si.The wave band area of the fabricated filters is from visible spectrum to near and middle infrared spectrum.The depositing technique for fabricating the filters and the results are given.The reason of how the system error comes into is analyzed,and a feasible method to adjust the system error is broughted forward.