Old Web
English
Sign In
Acemap
>
Paper
>
RF-プラズマ法によるSiC, Si 3 N 4 粉体の合成
RF-プラズマ法によるSiC, Si 3 N 4 粉体の合成
1987
kei hiiragi taira
akira mitui
jun'iti houjou
akio katou
Keywords:
Silicon nitride
Materials science
Optoelectronics
Silicon carbide
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI
[]