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Seeding ALD of high-k gate dielectric in CVD graphene FETs for enhanced device performance and reliability
Seeding ALD of high-k gate dielectric in CVD graphene FETs for enhanced device performance and reliability
2012
Woo Cheol Shin
Byung-Jin Cho
Keywords:
Gate dielectric
High-κ dielectric
Graphene
Seeding
Electronic engineering
Materials science
Optoelectronics
cvd graphene
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