Antireflection structures with use of multilevel subwavelength zero-order gratings
1997
It is known that the zero-order two-phase-level gratings with a period
much smaller and a thickness much larger than the wavelength may have
antireflection properties the same as appropriate dielectric layers under
normal incidence. On the basis of the rigorous coupled-wave analysis method
formulation, it is shown that multilevel unidimensional phase gratings, for
both TE and TM polarization, are functionally equivalent to antireflection
structures of multilevel dielectric layers, even if the period is close to the
wavelength.
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