Soft‐Chemistry‐Assisted On‐Chip Integration of Nanostructured α‐Quartz Microelectromechanical System

This project had received funding from the European Research Council (ERC) under the European Union's Horizon 2020 research and innovation programme (project SENSiSOFT No.803004). L.P. acknowledges the ATIP–Avenir program for financial support. The authors thank C. Andre for providing the transfected HT1080 cell line and C. Cazevielle (MRI‐COMET, Montpellier) for assistance with biological SEM images. The authors thank D. Montero for performing the FEG–SEM images and chemical analysis. The FEG–SEM instrumentation was facilitated by the Institut des Materiaux de Paris Centre (Grant No. IMPC FR2482) and was funded by Sorbonne Universite, CNRS and by the C'Nano projects of the Region Ile‐de‐France. The authors thank Frederic Pichot, David Bourrier, and Guilhem Larrieu for the expertise and advice during the cantilever lithographic processes. The authors also thank Wioletta Trzpil, Frank Augereau, and Eric Rosenkrantz for the advice during vibrometry measurements. A.G and M.G acknowledge funding from the Spanish Ministerio de Ciencia e Innovacion through the severo Ochoa program (CEX2019‐000917‐S).