MEMS speaker apparatus and corresponding method of production

The invention provides a MEMS speaker device and a corresponding manufacturing method. The MEMS speaker device includes a first substrate (S1) having a first front side (V S1) and a first back side (RS1) having a first Ruckseitenkaverne (K1), which is from a sound generating means (M) at least partially covers; having the (from a first perforated plate means BP a second substrate (S2; S2 ') having a second front face (VS2; VS2') and a second rear side (RS2;; RS2 ') having a second Ruckseitenkaverne (K2 K2') SH ') is covered; wherein the second back side (RS2, RS2 ') in such a way to the first front face (VS1) is bonded to the second Ruckseitenkaverne (K2; K2') is arranged above the sound generating means (M); (BP SH ') and a second perforated plate means (;;' SH 'SH BP'), which above the first perforated plate means is mounted; wherein at least one of the first perforated plate means (BP SH ') and the second perforated plate means (SH; BP' SH '') is elastically deflectable, that a passage of sound, the sound generating means (M) by an interaction of the first perforated plate means (BP SH ') and the second perforated plate means (SH; BP' SH '') is modulated.