Noncontacting laser-based techniques for the determination of elastic constants of thin silicon membranes

For the design of microsystems it is frequently desired to determine elastic constants of the used materials in their real dimensions. Geometries are foils and membranes. Two methods were proposed to determine elastic constants based on the tensile test with a laser sensor to determine strain and a resonant frequency technique.The elastic data measured correspond to those presented in literature for macrospecimens.