Multifunctional sensor (Magnetic field and temperature) based on Micro-structured and multilayered SAW device

This work aims to present a multifunctional surface acoustic wave (SAW) device that is capable of simultaneously measuring magnetic field as well as temperature. This is achieved in three parts where a multilayered approach is used to first achieve a temperature compensated Love wave structure, followed by a micro-structuration of the sensitive layer to eliminate the effects of temperature on magnetic anisotropy and finally multiple resonances observed allow a multifunctionality in our device.