Coolable backing plate for targets in Vakuumzerstäubungsanlagen

Coolable support plate (1) for the target (2) in Vakuumzerstaubungsanlagen with a connection surface and at least one fastening means uptake (4) for connecting the carrier plate (1) on a designated component (5), at least one sealing means (8) for sealing the terminal area, at least a cavity for passage of a coolant with a coolant inlet (11) and a coolant outlet (12), and a receiving area for receiving a target (2), wherein the cavity through a coolant channel (6) or a network of coolant channels (6) is formed, the or the inside of the carrier plate (2), characterized in that the coolant duct (6) or the network of coolant passages (6) in the transverse direction of the support plate extending (1), sections produced by drilling and in the longitudinal direction of the support plate comprising (1) extending, prepared by milling sections.