Old Web
English
Sign In
Acemap
>
Paper
>
Low-Temperature Deposition of Silicon Nitride Films Using Ultraviolet-Irradiated Ammonia
Low-Temperature Deposition of Silicon Nitride Films Using Ultraviolet-Irradiated Ammonia
2019
Yoshinobu Shiba
Akinobu Teramoto
Tomoyuki Suwa
Katsutoshi Ishii
Akira Shimizu
Kota Umezawa
Rihito Kuroda
Shigetoshi Sugawa
Keywords:
Inorganic chemistry
Deposition (law)
Ammonia
Silicon nitride
Ultraviolet
Irradiation
Chemistry
low temperature deposition
Correction
Source
Cite
Save
Machine Reading By IdeaReader
19
References
0
Citations
NaN
KQI
[]