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MPP (Modulated Pulsed Power)와 Magnetron Sputtering을 이용한 박막의 특성 평가
MPP (Modulated Pulsed Power)와 Magnetron Sputtering을 이용한 박막의 특성 평가
2013
Gwan Sik Min
Ju-Yeong Yun
Yong-Hyeon Sin
Deok-Jun Cha
Chang-Eop Yeo
Hwan-Yeol Park
Yun-Seong Heo
Gi-Gwan Tae
Jin-Tae Kim
Keywords:
Optoelectronics
Materials science
Sputter deposition
Correction
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