Design and Analysis of MEMS Biaxial Coupled Resonance Accelerometer

In this paper, a new type of biaxial coupled resonant accelerometer is designed, which mainly includes proof mass, four double-ended tuning forks, micro-lever, excitation comb and detection comb. The biaxial coupled resonant accelerometer can measure acceleration along the X and Y axes with coupled structure. In addition, the manufacturing process of the resonant accelerometer is described. The modal analysis, harmonic response analysis and thermodynamic analysis of the tuning fork are carried out based on the relative parameters of silicon material.