Microwave Argon Plasma Torch

Abstract : Argon plasma torch at atmospheric pressure sustained by travelling electromagnetic surface wave is theoretically studied by means of self-consistent model. The model is based on self-consistently linked kinetic and electrodynamic sets of equations describing both the gas discharge properties and the wave propagation characteristics along the axially inhomogeneous Argon plasma column surrounded by vacuum. A steady-state Boltzmann equation coupled with a collisional radiative model for Argon discharge is numerically solved together with Maxwell s equations for an azimuthally symmetric TM surface wave. The Argon ground state and seven excited states (4s, 4p, 3d, 5s, 5p, 4d, 6s) considered as blocks of levels are taken into account. The axial distributions of wave and plasma characteristics as well as a 3D plot of electron energy distribution function (EEDF) are obtained.