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Fabrication of High-Mobility Si0.7Ge0.3 Channel FinFET for Optimization of Device Electrical Performance
Fabrication of High-Mobility Si0.7Ge0.3 Channel FinFET for Optimization of Device Electrical Performance
2021
Yan Li
Cheng Xiaohong
Fei Zhao
Zhaoyang Zhong
Haoyan Liu
Ying Zan
Tianshuo Li
Yongliang Li
Keywords:
Materials science
electrical performance
Communication channel
Fabrication
Optoelectronics
Correction
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