Flow and temperature patterns in an inductively coupled plasma reactor: Experimental measurements and CFD simulations

Measurements of temperature patterns in an inductively coupled plasma (ICP) have been carried out experimentally. Plasma torch was operated at different RF powers in the range of 3–14 kW at near atmospheric pressure and over a wide range of sheath gas flow rate (3–25 lpm). Measurements were made at five different axial positions in ICP torch. The chordal intensities were converted into a radial intensity profile by Abel Inversion technique. Typical radial temperature profile shows an off-axis temperature peak, which shifts toward the wall as the power increases. Temperatures in the range of 6000–14,000 K were recorded by this method. The temperature profiles in the plasma reactor were simulated using computational fluid dynamics (CFD). A good agreement was found between the CFD predictions of the flow and temperature pattern with those published in the literature as well as the temperature profiles measured in the present work. © 2014 American Institute of Chemical Engineers AIChE J, 60: 3647–3664, 2014