Nanoindentation, AFM and tribological properties of thin nc-WC/a-C Coatings

Abstract Instrumented indentation, AFM (atomic force microscopy) and tribological studies were performed on PE CVD (Plasma Enhanced Chemical Vapor Deposition) nanocomposite WC–C coatings to investigate the effects of surface roughness on the reliability of nanoindentation data and the possibilities of different AFM modes in nanomechanical testing, which can be used as a feedback to optimize deposition technology from the viewpoint of their mechanical properties. It was confirmed that surface roughness below 30 nm is necessary to keep the scatter of indentation modulus, E IT , and hardness, H IT , below 15%. PF QNM (Peak Force Quantitative NanoMechanical) mode was successfully applied for qualitative mapping of the elastic modulus of coatings with the stiffness above 300 GPa. LFM (lateral force microscopy) mode showed only weak contrast and quantitative measurements in both AFM modes require precise calibration. Coefficients of friction of the studied WC–C coatings were below 0.2 at RT, but increased to 0.7–0.8 at 450 °C due to the formation of a transfer film. Optimization of the deposition conditions based on nanoindentation resulted in the increase of E IT from ∼220 GPa to 350 GPa and H IT from ∼17 GPa to ∼29 GPa.