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A Gold Proof-Mass Differential MEMS Accelerometer for Micro-G Level Sensing
A Gold Proof-Mass Differential MEMS Accelerometer for Micro-G Level Sensing
2020
Akihiro Uchiyama
Takashi Ichikawa
Tatsuya Koga
Shinichi Iida
Noboru Ishihara
Katsuyuki Machida
Kazuya Masu
Hiroyuki Ito
Keywords:
Microelectromechanical systems
Materials science
Proof mass
Accelerometer
differential
Acoustics
Correction
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