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Characterization of a-Si and SiOx Films Using CVD/ALD Combination System
Characterization of a-Si and SiOx Films Using CVD/ALD Combination System
2016
Jae-Hong Joo
Sang-Jun Kang
Chanthasombath Sisabay
Hong-Bin Chen
Kwang Ho Kim
Keywords:
Optoelectronics
Materials science
combination system
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