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Workfunction of Al-Doped ZnO Films Deposited by Atomic Layer Deposition
Workfunction of Al-Doped ZnO Films Deposited by Atomic Layer Deposition
2018
Peter G. Gordon
Goran Bačić
Gregory P. Lopinski
Seán T. Barry
Keywords:
Optoelectronics
Doping
Atomic layer deposition
Materials science
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