Hybrid Si3N4-LiNbO3 integrated platform for electro-optic conversion

Mikhail Churaev,Simon Hönl,Rui Ning Wang,Charles Mohl,Tianyi Liu,J. Connor Skehan,Johann Riemensberger,Daniele Caimi,Junqiu Liu,Paul Seidler,Tobias J. Kippenberg

Hybrid Si3N4-LiNbO3 integrated platform for electro-optic conversion

2020

Mikhail Churaev
Simon Hönl
Rui Ning Wang
Charles Mohl
Tianyi Liu
J. Connor Skehan
Johann Riemensberger
Daniele Caimi
Junqiu Liu
Paul Seidler
Tobias J. Kippenberg

We demonstrate the integration of a Si3N4 Damascene photonic platform with thin-film lithium niobate on insulator (LNOI) via direct wafer bonding. This process enables fabrication of hybrid X(2)-X(3) microresonators with Q " 106, as well as integrated travelling wave EO modulators.

Keywords:

Photonics
Insulator (electricity)
Lithium niobate
Copper interconnect
Phase (waves)
Optoelectronics
Fabrication
Phase modulation
Materials science
Wafer bonding

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