35.3: Distinguished Paper: A Novel Self-Aligned Top-Gate Oxide TFT for AM-OLED Displays

We developed a novel self-aligned top-gate oxide TFT for AM-OLED displays. Our developed Al reaction method to obtain source/drain regions is effective to fabricate a short channel and highly reliable TFT. A 9.9-inch diagonal qHD AM-OLED display was demonstrated to provide applicable solution for a large-sized and ultra-high definition OLED mass production.