The metastable C49 structure in sputtered TiSi2 thin films

Abstract As-deposited amorphous TiSi 2 thin films crystallize during annealing in two steps, forming the metastable C49 phase and the stable C54 phase of TiSi 2 respectively. The crystallites of the C49 phase show very complex diffraction patterns in the electron microscope. The analysis of these patterns is described.