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Ionized Magnetron Sputtering with a Coupled DC and Microwave Plasma
Ionized Magnetron Sputtering with a Coupled DC and Microwave Plasma
1996
D. B. Hayden
K. M. Green
Daniel R. Juliano
David N Ruzic
C.A. Weiss
A. Lantsman
J. Ishii
Keywords:
Optoelectronics
Ionization
Sputter deposition
Ion source
Materials science
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