High Energy-Density MEMS Based on Thin Ferroelectric Layers

The properties of the electromechanical energy conversion based on the electrostatic pressing (rolling) of the thin metallic film to the ferroelectric layer are considered. The operation of the micromotors utilizing this effect is analyzed. The optimal parameter ratios and operation modes are found to obtain maximum energy output, efficiency and power. The micromotors based on this energy conversion principle are shown to be much better than other electrostatic micromotors in terms of specific energy output. The application of these micromotors in the different MEMS devices is considered.