X-Y two-dimensional plane scan driving system for piezoelectric sweep tube of scanning probe microscope

The invention relates to a X-Y two-dimensional surface scanning driving system of the scanning probe microscope piezoelectricity flying-spot tube, which includes the drive signal of the scanning probe microscope rapid axis direction(the selectable saw-tooth wave driving signal and the sine wave driving signal),the ladder wave signal which drives the slow axis, thereinto the driving signal of the rapid axis and the slow axis can realizes the output channel exchange, namely changes the rapid axis and the slow axis when really drives the scanning probe. The invention can realizes locating scanning center of the X-Y two-dimensional surface in the most scanning scale, and scans the selected section. The scanning probe microscope piezoelectricity flying-spot tube driving system which the invention provided is used in studying the scanning probe microscope rapid scanning method, also as the flat scanning actuation module of the scanning probe microscope rapid scanning system. The system has quick-scanning velocity, better-applicability and so on.