High-density zinc oxide based target and preparation method thereof

The invention discloses a high-density zinc oxide based target and a preparation method thereof. The method sequentially comprises the following steps: mixing materials: adding a binder and water into raw materials, mixing uniformly, so as to obtain uniform slurry, and carrying out drying and powdering on the slurry, so as to obtain dry powder particles with uniform particle size distribution; carrying out binder removal and degassing: loading the dry powder particles into a package of a corresponding size, and carrying out binder removal and degassing treatment; carrying out hot isostatic pressing: soldering and sealing the package which is subjected to binder removal and degassing, and then, carrying out hot isostatic pressing treatment; annealing: carrying out annealing treatment on package removed ingot blank. The zinc oxide based target obtained by adopting the method has the advantages that the relative density is not lower than 99% of theoretical density, the density is uniform, the average crystal grain size is not greater than 30 microns, and the zinc oxide based target is free from air pores and loosening.