Old Web
English
Sign In
Acemap
>
Paper
>
Junction profiles of sub keV ion implantation for deep sub-quarter micron devices
Junction profiles of sub keV ion implantation for deep sub-quarter micron devices
2000
Amir AI-Bayati
Sanjeev Tandon
Roisin Doherty
Adrian Murrell
D. Wagner
Majeed A. Foad
Babak Adibi
R. Mickevicius
V. Menisilenko
S. Simeonov
Ai-Ru Jian
D. Sing
Camari Ferguson
Robert W. Murto
Lawrence E. Larson
Keywords:
Biology
Micrometre
Bioinformatics
Ion implantation
Analytical chemistry
Correction
Cite
Save
Machine Reading By IdeaReader
0
References
5
Citations
NaN
KQI
[]