1 MHz quartz length extension resonator as a probe for scanning near-field acoustic microscopy

Abstract The feasibility of a rod-shaped 1 MHz length extension quartz resonator as a probe for scanning near-field acoustic microscopy was investigated. A corner of the quartz rod which is exposed at an angle of 45 ° to the surface of the sample is used as a probing tip. The damping of the vibration increases with the approach of the tip to the sample and is used as a signal to obtain a topographic image of the sample at sub-micron resolution.