一体構造のX-Y方向超微小変位 ・ 微小角度設定装置

A newly developed elastic deflection apparatus for obtaining precise linear and angular microdisplacement is reported. The apparatus has a simple coaxial cylinder structure that can be easily manufactured using a lathe. Equations for the displacement ratio and table horizontality are theoretically derived, and the values calculated from these equations show good coincidence with those obtained by experiments. As for the linear displacement, the apparatus can set a position with 0.01 μm resolution over a 4 μm range, and the table horizontality is kept within 0.01" over the same range. As for the angular displacement, the apparatus can set an angular displacement such as 0.77", 0.38" or 0.15" by means of a photoelectric autocollimator.