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High efficiency chemical mechanical polishing method using ultrasonic vibration
High efficiency chemical mechanical polishing method using ultrasonic vibration
2017
Ryohei Ito
Kenshiro Nakanishi
Michio Uneda
Masashi Take
Ken-ichi Ishikawa
Keywords:
Chemical-mechanical planarization
Ultrasonic sensor
Materials science
Ceramic materials
Composite material
Vibration
ultrasonic vibration
Correction
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