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Study of improvement in silicon bulk micromachining by metal assisted chemical etching
Study of improvement in silicon bulk micromachining by metal assisted chemical etching
2020
Rensong Guo
Qiyu Huang
Shutang Wang
Jian Xu
Jiefeng Cao
He Lin
Keywords:
Nanotechnology
Isotropic etching
Silicon
Metal
Bulk micromachining
Materials science
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