Triaxial air bearing table high-precision attitude angle and angular velocity measuring device

The invention discloses a triaxial air bearing table high-precision attitude angle and angular velocity measuring device. According to the invention, an intelligent measuring head, a gyroscope, and a four-side prism are arranged on an instrument platform of the triaxial air bearing table. A laser tracker is arranged below the triaxial air bearing table. Two photoelectric autocollimators are orthogonally arranged below the triaxial air bearing table. During large-angle movement, data of the gyroscopes and the laser tracker are subjected to Kalman filtering fusion, such that angle and angular velocity information of the air bearing table is obtained. During small-angle movement, data of the two photoelectric autocollimators are directly combined, such that angle and angular velocity information of the air bearing table can be obtained. With the device provided by the invention, non-contact, high-precision, and dynamic measuring of the attitude angle and angular velocity of the triaxial air bearing table can be realized. The device is also suitable for attitude angle measuring of a uniaxial air bearing table.