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Superconducting NbTiN Thin Films with Highly Uniform Properties over a 100 mm diameter Wafer
Superconducting NbTiN Thin Films with Highly Uniform Properties over a 100 mm diameter Wafer
2016
David J. Thoen
Jochem J. A. Baselmans
T. M. Klapwijk
Akira Endo
E. A. F. Haalebos
Boy Gustaaf Cornelis Bos
Keywords:
Wafer
Physics
Thin film
Superconductivity
Condensed matter physics
Correction
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