Status and performance of the 0.5-NA EUV microfield exposure tool at Berkeley Lab (Conference Presentation)

To meet industry demand for EUV materials testing capabilities down to the 2 nm lithography node, the EUV Photoresist Testing Center at Berkeley Lab has been expanded to include a 8-nm resolution, 0.5-NA EUV microfield exposure system with robotic sample processing tailed for research. This paper provides an overview of the capabilities and performance of the 0.5-NA EUV exposure system and discusses printing results since user commissioning shifts began in Q2 2019.