Approaching sub-50 nanoradian measurements by reducing the saw-tooth deviation of the autocollimator in the Nano-Optic-Measuring Machine

Since the development of the Nano-Optic-Measuring Machine (NOM), the accuracy of measuring the profile of an optical surface has been enhanced to the 100-nrad rms level or better. However, to update the accuracy of the NOM system to sub-50 mad rms, the large saw-tooth deviation (269 nrad rms) of an existing electronic autocollimator, the Elcomat 3000/8, must be resolved. We carried out simulations to assess the saw-tooth-like deviation. We developed a method for setting readings to reduce the deviation to sub-50 nrad rms, suitable for testing plane mirrors. With this method, we found that all the tests conducted in a slowly rising section of the saw-tooth show a small deviation of 28.8 to <40 nrad rms. We also developed a dense-measurement method and an integer-period method to lower the saw-tooth deviation during tests of sphere mirrors. Further research is necessary for formulating a precise test for a spherical mirror. We present a series of test results from our experiments that verify the value of the improvements we made. (C) 2015 The Authors. Published by Elsevier B.V.