Temperature Analysis of Electrothermal Microactuators with a Nodal Analysis Model Built Based on the Weighted Residue Method

This paper develops a nodal analysis model of in-plane electrothermal microactuators with the Galerkin method based on the weighted residue method.With high accuracy,easy modeling,and clear configuration,the model makes it possible to co-simulate with the control circuit,which means it can simulate the whole system with the electrothermal microactuators.The model is verified by simulation with ANSYS and agrees well with it.