Dynamic Force Transducer Calibration Based on Electrostatic Force

Measurements of micro/nano dynamic force transducers (DFTs) in the micro-Newton range are of significant importance in many fields. In this paper, the electrostatic force in the micro-Newton range was used to generate dynamic force to calibrate the DFT, which is traceable to the International System of Units (SI). The relationship between the force input and voltage output of a DFT was investigated. The performance of DFT, such as resolution and reproducibility had been tested by the proposed method. The uncertainties, such as eccentric loading position, electrostatic force, output voltage measurement, and stiffness measurement, were estimated. The results showed that relative standard uncertainty in the determination of the calibration of the transducer was approximately 2.2%. This showed that the proposed system was very stable and repeatable.