ANSYS simulation of the microaccelerometer sensor

V. V. Kalugin,S. P. Timoshenkov,Stepan Anchutin,Elena Kochurina

ANSYS simulation of the microaccelerometer sensor

2019

V. V. Kalugin
S. P. Timoshenkov
Stepan Anchutin
Elena Kochurina

The use of the ANSYS software for modeling the design of the sensitive element of the microaccelerometer is considered. The article presents the results of modal and static analysis. The features of the manufacturing technology of the sensitive element of the micromechanical accelerometer are given.

Keywords:

Structural engineering
Computer science

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