A New Structure MEMS Thermal Flow Sensor Combining Two Principles

A new structure MEMS thermal flow sensor combining two principles of temperature-difference and anemometer is designed and manufactured.A Finite Element Analysis of temperature-difference flow sensor is first performed to observe the sensitivity and range.The new design is based on the FEA results.A Matlab/Simulink modeling is then conducted to help design the new sensor and its control circuit.The sensor is manufactured by micromachining technology and finally tested,which is proved to be almost 4 times sensitive than traditional MEMS flow sensor.