Single-stripe tunable laser with Chirped Sampled Gratings fabricated by nanoimprint lithography

Fabrication of diffraction gratings of Chirped Sampled Grating Distributed Reflector (CSG-DR) laser by nanoimprint lithography (NIL) has been demonstrated. The diffraction gratings with highly uniform linewidth and period have been successfully fabricated by the combination of the reverse-tone NIL and precise etching techniques. The fabricated CSG-DR laser using NIL shows sufficiently wide tuning range of 40 nm as we designed.