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Analytical plasma impedance model of dual frequency capacitive discharges with ion dynamics
Analytical plasma impedance model of dual frequency capacitive discharges with ion dynamics
2019
Jan Kuhfeld
Yukinori Sakiyama
Uwe Czarnetzki
Keywords:
Atomic physics
Plasma
Capacitive sensing
Electrical impedance
Ion
Chemistry
plasma impedance
dual frequency
Correction
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